From the grand entrance, the spacious factory area is divided into two parts along the central axis. On the east side, fule Semiconductor Technology Co., Ltd. has an annual output of 12 million copper-clad ceramic substrates for semiconductor power modules; on the west side, fule quartz Technology Co., Ltd. has an annual output of 300000 new high-purity precision quartz semiconductor materials. The two projects have a common goal: to set a new record of the world's largest production capacity. What makes journalists more exciting is the innovation power and technical support that condenses behind the brave struggle for the first place.
At the entrance of the first phase of the two projects, Ferrotec semiconductor technology and quartz new material, which were put into production in the early stage, there are fashion exhibition halls with the main color of science and technology blue. In the semiconductor exhibition hall, there is a power semiconductor substrate in a glass cover, equipped with various models such as high-speed rail car, new energy vehicle, etc. its purpose and function are clear at a glance. In the exhibition hall of new quartz materials, high-purity quartz stone products of different sizes are crystal clear and have different shapes, which makes people have unlimited reverie. According to hang Xiaojie, deputy general manager of the division of Ferrotec quartz Technology Co., Ltd., both of these products have the core technology of leading peers. Copper clad ceramic substrate is an electronic basic material which is made by sintering uranium foil on the surface of ceramic by direct bonding technology. It can be widely used in new energy vehicles, rail transit, aerospace, new energy materials, laser technology and other technical fields. Ferrotec copper-clad ceramic substrate is 10 times the thickness of the same kind of products, representing the international advanced level. It can be equipped with high-precision chips, not only with high mechanical strength, but also with superior performance. With the development of semiconductor technology, high-purity quartz new materials are widely used in various processes of semiconductor production, such as polycrystalline conversion to monocrystalline silicon, cleaning and diffusion, ion implantation bell cover, etc. Ferrotec quartz Dongtai production base is mainly to provide supporting facilities for the semiconductor equipment company Lam research, which ranks first in the global sales of plasma etching equipment.
Ferrotec automatic copper-clad ceramic substrate production line is separated on both sides of a clean access road. From raw material cleaning to oxidation treatment, copper ceramic sintering and bonding, from film pasting, exposure to development and etching, and then to post-processing, each process and process inadvertently embodies a simple and intelligent production concept. In the sintering workshop on the south side of the channel, there is a quiet white cabinet arranged in order. The cabinet surface is normal temperature, and the furnace temperature of the sintering furnace is up to more than 1000 degrees Celsius. Several tubes of different colors on the cabinet introduce various "nutrients", providing the best environment atmosphere for copper and ceramic bonding in the cabinet. "They are experts from Japan, they are debugging the intelligent production line," said a group of technicians wearing one-piece dust-proof clothes The leader of the workshop pointed out to the reporter. In the small glass room on the left side of the furnace, there is a robot connected with two mechanical arms, and "one hand" orderly sends pieces of copper plates into the entrance of the sintering furnace; on the right side, the sintered semi-finished products are slowly pushed out from the furnace and sent to the other side of the furnace through the conveyor belt, and the robot stretches out "the other hand" to take them back unhurriedly. Under the robot, there is a square car, "he is also a robot, running errands. He is responsible for delivering materials and transporting semi-finished products." At present, the first sintering furnace production line intelligent improvement has been completed. According to the plan, in March, all the mechanical equipment in the sintering workshop should be intelligentized.
Quartz processing has gone through cutting, grinding, fine grinding, numerical control processing and other processes. It looks like a "rough" living processing workshop, but it emphasizes fine. "Each production line here is guided by international standards. The new production line can only be put into operation after being approved by the partner Lam company. At present, three new cleaning lines are set up to realize the technology in line with the international standards and ensure the international quality of products. " About hang Xiaojie. Quartz blanking is to cut a piece of raw material into quartz pieces that meet the specifications according to the size. Only one piece of quartz piece rotates continuously under the washing of water column, without dust or pungent smell. In the numerical control processing workshop of quartz production line, a numerical control processing center is placed in rows. Through the glass on the "chest" of one machine, it can be seen that inside, a round quartz panel sits stably on the base, and under the wash of water column, it is continuously rotated and polished. The CNC center lies in its strong self production control ability. Workers put in quartz chips and input instructions. After a circle of quartz chips in the CNC machining center, they come out and become finished products. The 88 machines in the CNC center are all imported equipment. "These machines have strict coordinate standards. Even if they move one centimeter, they will automatically stop working and wait for the technical staff of the headquarters to correct before they can be used."