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SiC Parts
SiC Parts

SiC Part

Among the material products, CVD-SiC is a growth product which can be used as fixtures and components of semiconductor production equipment. SiC is the chemical compound composed of a 1:1 combination of Silicon and Carbon whose hardness ranks the third in the world surpassed only by Diamonds and Boron carbide. Ferrotec is using silicon and carbon element containing gases for manufacturing, which is also called CVD method. For SiC wafer manufacturing, SiC is coated over the surface of the plate shaped graphite substrate by CVD. After cutting the outer edges, the graphite substrate is removed by high-temperature oxidation and then several subsequent processes are carried out to manufacture the SiC wafer. SiC has attracted more attention as a high purity material applied in the energy industry and other most advanced ones as well.
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Tel: 0571-88995910
Tel: 0571-88995910
Heat resistance
Heat resistance
Chemical stability
Chemical stability
Oxidation resistance
Oxidation resistance
Characteristic and Application
Ferrotec SiC components have strong oxidation resistance, chemical stability, heat resistance, and excellent stability even at 2000℃. They are not only widely used in the fabrication of semiconductor materials manufacturing requiring wafer boat, tubes, and dummy wafers, but also applied to fixtures used at high temperatures. SiC components also widely used in semiconductor production equipment,automobile, satellite, energy and other advanced industries.
Application scenario
  • Semiconductor production equipment
    Semiconductor production equipment
  • Aerospace
    Aerospace
  • Automobile
    Automobile
  • Satellite
    Satellite
  • Energy
    Energy
Semiconductor production equipment
Aerospace
Automobile
Satellite
Energy
Semiconductor production equipment
Semiconductor production equipment
Aerospace
Aerospace
Automobile
Automobile
Satellite
Satellite
Energy
Energy
Matrix diagram of applications in various fields
Production base
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